仪器简介:
PANalytical'sSemyosenergy-dispersiveXRFwaferanalyzeristhelatestofoursuccessfulprocesscontroltoolsdesignedspecificallyforsemiconductoranddatastoragemetrology.Thisversatileinstrumentdetermineslayercompositionandthicknessuniformityforawiderangeofprocessfilms.
Moreover,withits<23umFWHMmicrospot,itisabletomeasureinthescribelinesorindedicatedmetrologyareasonproductionwafers.
TheSemoswaferanalyzerisanadvancedmetrologytoolthataddressesthefollowingindustrydemands:
*On-productthinfilmmetrology
*In-lineprocesscontrol
*Simultaneousdeterminationoffilmthinknessandcomposition
*Abilitytocharacterizesinglefilmsandmulti-layerstacks
*Excellentrepeatabilityandreproducibility(GaugeR&R)
*MinimalCOOthroughexcellentuptime,highthroughputandminimumconsumptionofutilities
主要特点:
Semyos:Addressingtheneedsofthesemiconductoranddatastorageindustry.
MicrospotXRFanalysisonproductionwafers
Versatilewaferhandling
Forin-lineproductionXRFanalysis
Designedforease-of-use